Get expert advice and tailored solutions for your research needs
The SRP-2100 series is Semilab’s flagship solution for high-precision spreading resistance profiling (SRP) and dopant concentration analysis in semiconductor wafers. Suitable for silicon and compound semiconductors (with PCIV option), it delivers fully automated, accurate depth profiling for process monitoring, failure analysis, and device characterization.
SRP-2100 / SRP-2100i Spreading Resistance Profiling
Author: Samu Viktor, Kerekes Árpád, Pongrácz Anita, Durkó Zsolt
Topic: microPL; JPV; photo-modulated reflectance
Author: E. E. Najbauer, L. Sinkó, Sz. Biró, Z. Durkó, P. Basa
Topic: carrier density; epitaxial layer; semiconductor; Silicon (Si); SRP-2100; SRP; FTIR REFLECTOMETRY
SRP-2100 / SRP-2100i Spreading Resistance Profiling
