A Novel Pretreatment for Thin-Film Measurements
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The modular Spectroscopic Ellipsometer is a highly versatile thin film characterization system covering the widest spectral range in a single tool (190 nm – 25 µm). It enables non-contact, non-destructive analysis of film thickness, optical constants, multilayer stacks, and advanced material properties with unmatched flexibility.
SE-2000 Spectroscopic Ellipsometry
Author: Ferenc Korsós, Péter Tüttő, Ilias Saegh, Krisztián Kis-Szabó, and Attila Tóth
Topic: 4pp; diffusion; junction photovoltage technique; photovoltaics; process monitoring
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Topic: spectroscopic ellipsometry
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Topic: ellipsometry; rotating compensator; mueller matrix; spectroscopic ellipsometer
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Topic: Ge-Si alloys; boron; elemental semiconductors; semiconductor doping; semiconductor epitaxial layers
Author: Máté Füredi, Cristina V. Manzano, András Marton, Bálint Fodor, Alberto Alvarez-Fernandez,*
Topic: EP
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Topic: spectroscopic ellipsometry
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Topic: doping; Electrical properties; spectroscopic ellipsometry; thin films; atomic layer deposition
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Topic: Lamp cleaning; Organic contamination; Volatile contaminants; hydrocarbons
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Topic: spectroscopic ellipsometry
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Author: Homogeneous Transparent Conductive ZnO:Ga by ALD for Large LED Wafers
Topic: GZO; Atomic layer deposition; TCO; Rapid thermal annealing; LED
Author: O. Mhibik, S. Ch´enais, S. Forget, Ch. Defranoux, S. Sanaur
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Topic: Ellipsometers; ellipsometry; ellipsometry porosimetry; ELLIPSOMETRIC POROSIMETRY; ELLIPSOMETRIC POROSIMETRY (R&D); Mesoporous silica films; Porosimetry; mesoporous
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Topic: ellipsometry; spectroscopic ellipsometry
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Topic: ellipsometry; modelling; Artifact minimization; Numerical inversion
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Topic: spectroscopic ellipsometry; EP
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Topic: spectroscopic ellipsometry
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Topic: spectroscopic ellipsometry
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Topic: spectroscopic ellipsometry; Fluorinated tin oxide; Low emissivity; annealing
Author: Windisch M., Buza G., Maloveczky A., Vida Á., Selmeczi D., Dankházi Z.:
Topic: Si surfaces; spectroscopic ellipsometry; surface treatment
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Topic: spectroscopic ellipsometry
SE-2000 Spectroscopic Ellipsometry
