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The DLS-83D is a compact, tabletop Deep Level Transient Spectroscopy (DLTS) system designed for high-sensitivity characterization and identification of electrically active defects (deep-level traps) and impurities in semiconductor wafers. It is ideal for universities, material science research centers, and advanced R&D labs, offering precise and reliable measurements in a small footprint.
DLS-83D Deep Level Transient Spectroscopy
Author: Mikio Fukuhara, Tomonori Yokotsuka, Tetsuo Samoto, Masahiko Kumadaki, Mitsuhiro Takeda, Toshiyuki Hashida
Topic: Hall effect measurements; Materials science; Organic contamination; semiconductor; semiconductor materials; Semiconductor Devices; NANO HARDNESS; PDL Hall
Author: H-J. Schulze, A. Frohnmeyer, F-J. Niedernostheide, B. Simmnacher, B.O. Kolbesen, P. Tüttő, T. Pavelka, G. Wachutka
Topic: transition metals; contamination; carrier lifetime; silicon defect density
Author: L. Quattropani, K. Solt, P. Niedermann, I. Maggio-Aprile, O. Fischer, T. Pavelka
Topic: Schottky diode; RF plasma treated silicon
Author: M. Wilson, J. Lagowski, L. Jastrzebski, A. Savtchouk, V. Faifer
Topic: COCOS; Dielectrics; Semiconductor device characterization; Dielectric thin films; Electric measurements; Contact potential
Author: D.K. Schröder
Topic: Silicon (Si); Electric measurements; Metal–insulator–semiconductor structures; Surface and interface states; Contact potential; Work function; Epitaxial silicon
Author: C.A. Londos, T. Pavelka
Topic: DLTS; GaAs
Author: D.A. Ramappa, W.B. Henley
Topic: diffusion; iron; silicon dioxide
Author: D. Huber, P. Eichinger, G. Ferenczi, T. Pavelka, G. Veszely
Topic: Microwave transient spectroscopy; deep levels; semiconductor
Author: T. Pavelka and G. Ferenczi
Topic: Thermal emission; deep trap
Author: B. Sandhu, T. Ogikubo, H. Goto, V. Csapó, T. Pavelka
Topic: DLTS; SIRM; Silicon (Si); Mo; Fe; deep levels; carrier lifetime
Author: T. Pavelka and B. Hemm
Topic: Microwave Absorption Spectroscopy
Author: O. Engström, M.Kaniewska, W.Jung, M.Kaczmarczyk
Topic: Deep level transient spectroscopy; quantum dots; tunneling; conduction bands; electric field
DLS-83D Deep Level Transient Spectroscopy
